JPH083003Y2 - 半導体における処理薬液の汲み上げ装置 - Google Patents
半導体における処理薬液の汲み上げ装置Info
- Publication number
- JPH083003Y2 JPH083003Y2 JP933090U JP933090U JPH083003Y2 JP H083003 Y2 JPH083003 Y2 JP H083003Y2 JP 933090 U JP933090 U JP 933090U JP 933090 U JP933090 U JP 933090U JP H083003 Y2 JPH083003 Y2 JP H083003Y2
- Authority
- JP
- Japan
- Prior art keywords
- chemical liquid
- suction pipe
- container
- pumping
- suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000126 substance Substances 0.000 title claims description 72
- 238000005086 pumping Methods 0.000 title claims description 20
- 239000004065 semiconductor Substances 0.000 title claims description 3
- 239000007788 liquid Substances 0.000 claims description 65
- 238000005530 etching Methods 0.000 description 20
- 239000003814 drug Substances 0.000 description 4
- 230000000740 bleeding effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP933090U JPH083003Y2 (ja) | 1990-01-31 | 1990-01-31 | 半導体における処理薬液の汲み上げ装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP933090U JPH083003Y2 (ja) | 1990-01-31 | 1990-01-31 | 半導体における処理薬液の汲み上げ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH03101515U JPH03101515U (en]) | 1991-10-23 |
JPH083003Y2 true JPH083003Y2 (ja) | 1996-01-29 |
Family
ID=31512937
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP933090U Expired - Fee Related JPH083003Y2 (ja) | 1990-01-31 | 1990-01-31 | 半導体における処理薬液の汲み上げ装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH083003Y2 (en]) |
-
1990
- 1990-01-31 JP JP933090U patent/JPH083003Y2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH03101515U (en]) | 1991-10-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS61125429A (ja) | 薬液分配装置 | |
JPH083003Y2 (ja) | 半導体における処理薬液の汲み上げ装置 | |
JP3713621B2 (ja) | 横軸ポンプ | |
CN102979700A (zh) | 一种用于真空泵的自动排液装置及真空泵 | |
CN217547958U (zh) | 液体输送系统及基站 | |
KR100472567B1 (ko) | 듀얼진공 하수수집 시스템 | |
CN211410336U (zh) | 一种医用负压一体机组 | |
CN215890362U (zh) | 一种重力式负压水气分离装置 | |
US4605497A (en) | Device for processing fluid with solid bodies | |
KR200366720Y1 (ko) | 진공펌프를 이용하여 탱크들 간에 액을 서로 주고 받을수 있게 하는 장치 | |
JPS6132907Y2 (en]) | ||
JPH0123534Y2 (en]) | ||
JP3077822U (ja) | タンク装置 | |
EP0175193A2 (en) | Device for processing fluid with solid bodies | |
JPS5924350Y2 (ja) | 流体の吸、排出装置 | |
JP2517774Y2 (ja) | ドレン排出装置 | |
CN222018242U (zh) | 一种新型污水箱结构及清洁设备 | |
CN221190679U (zh) | 一种多线路负压输送装置 | |
JP2000325703A (ja) | 脱気装置 | |
JPS5815377Y2 (ja) | 諸味などの移送装置 | |
JPH10110462A (ja) | 真空吸引搬送装置及び真空吸引搬送方法 | |
JPS6026020Y2 (ja) | 魚を移送するポンプ装置 | |
KR950026783A (ko) | 저수탱크용 잔수처리기 | |
KR200371175Y1 (ko) | 듀얼진공 하수수집 시스템 | |
JPH0240040Y2 (en]) |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |